NDLI: Dissociative Excitation of C$_{2}$H$_{2}$ in the Electron Cyclotron Resonance Plasma of Ar: Production of CH(A$^{2}$Δ) Radicals and Formation of Hydrogenated Amorphous Carbon Films

Content Provider	Springer Nature Link
Author	Ito, Haruhiko Koshimura, Katsuaki Onitsuka, Saori Okada, Kohtaro Suzuki, Tsuneo Akasaka, Hiroki Saitoh, Hidetoshi
Copyright Year	2012
Abstract	The dissociative excitation reaction of C$_{2}$H$_{2}$ with the electron-cyclotron resonance plasma of Ar was investigated based on the electrostatic-probe measurements and on the optical emission spectroscopy of the CH(A$^{2}$Δ–X$^{2}$Π) transition. The density, n $_{e}$, and the temperature, T $_{e}$, of free electrons were controlled by adding H$_{2}$O molecules externally into the reaction region, and the dependence of the CH(A$^{2}$Δ–X$^{2}$Π) emission intensity on the addition of H$_{2}$O was observed to compare with the evaluated dependencies based on n $_{e}$ and T $_{e}$. The mechanism of production of CH(A$^{2}$Δ) was found, predominantly, to be the electron impact with the contribution of 10–20% of the electron-impact dissociation of C$_{2}$H radicals; the contribution of the ion–electron recombination was negligible. Hydrogenated amorphous carbon films were fabricated using the same reaction system. The atomic compositions, Raman spectra, and the hardness of films were discussed in terms of the variations of n $_{e}$ and T $_{e}$ upon the addition of H$_{2}$O molecules.
Starting Page	231
Ending Page	248
Page Count	18
File Format	PDF
ISSN	02724324
Journal	Plasma Chemistry and Plasma Processing
Volume Number	32
Issue Number	2
e-ISSN	15728986
Language	English
Publisher	Springer US
Publisher Date	2012-02-19
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	ECR plasma Optical emission spectrum C$_{2}$H$_{2}$ CH(A–X) transition Hydrogenated amorphous carbon Mechanics Characterization and Evaluation of Materials Inorganic Chemistry Mechanical Engineering Nuclear Physics, Heavy Ions, Hadrons
Content Type	Text
Resource Type	Article
Subject	Chemistry Surfaces, Coatings and Films Condensed Matter Physics Chemical Engineering

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