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| Content Provider | Springer Nature Link |
|---|---|
| Author | Twomey, B. Nindrayog, A. Niemi, K. Graham, W. G. Dowling, D. P. |
| Copyright Year | 2010 |
| Abstract | The effect of varying process parameters on atmospheric plasma characteristics and properties of nanometre thick siloxane coatings is investigated in a reel-to-reel deposition process. Varying plasma operation modes were observed with increasing applied power for helium and helium/oxygen plasmas. The electrical and optical behaviour of the dielectric barrier discharge were determined from current/voltage, emission spectroscopy and time resolved light emission measurements. As applied power increased, multiple discharge events occurred, producing a uniform multi-peak pseudoglow discharge, resulting in an increase in the discharge gas temperature. The effects of different operating modes on coating oxidation and growth rates were examined by injecting hexamethyldisiloxane liquid precursor into the chamber under varying operating conditions. A quenching effect on the plasma was observed, causing a decrease in plasma input power and emission intensity. Siloxane coatings deposited in helium plasmas had a higher organic component and higher growth rates than those deposited in helium/oxygen plasmas. |
| Starting Page | 139 |
| Ending Page | 156 |
| Page Count | 18 |
| File Format | |
| ISSN | 02724324 |
| Journal | Plasma Chemistry and Plasma Processing |
| Volume Number | 31 |
| Issue Number | 1 |
| e-ISSN | 15728986 |
| Language | English |
| Publisher | Springer US |
| Publisher Date | 2010-11-14 |
| Publisher Place | Boston |
| Access Restriction | One Nation One Subscription (ONOS) |
| Subject Keyword | Atmospheric pressure plasma Plasma diagnostics Aerosol precursor Thin films Nuclear Physics, Heavy Ions, Hadrons Inorganic Chemistry Mechanical Engineering Characterization and Evaluation of Materials Mechanics |
| Content Type | Text |
| Resource Type | Article |
| Subject | Chemistry Surfaces, Coatings and Films Condensed Matter Physics Chemical Engineering |
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