NDLI: Diagnostics of a Radio-Frequency Plasma Expanding Through a Nozzle (PETN) at Low Pressure

Content Provider	Springer Nature Link
Author	Avni, R. Miralaï, S. F. Prevot, F. Morvan, D. Amoroux, J. Nickel, H.
Copyright Year	1997
Abstract	The diagnostics of the radio-frequency (induction mode) plasma expanded through a nozzle (PETN) at low pressures (100–1000 Pa) was performed by on-line optical emission spectroscopy (OES) and on line quadrupole mass spectrometry (QMS). The OES was used for evaluating the electronic, vibrational, and rotational temperatures (T$_{e}$, T$_{v}$, and T$_{r}$) along the plasma reactor before and after the nozzle. The PETN gas mixtures analyzed were Ar+N$_{2}$, Ar+CO, and Ar+O$_{2}$with an addition of 1 vol.% N$_{2}$to the last two gas mixtures. For the same conditions in the PETN the values of T$_{e}$, T$_{v}$, and T$_{r}$ were found to be different for the different gas mixtures and related to the depopulation of excited N 2 + by oxygen atoms. Moreover the Ar+O$_{2}$PETN aqueous solutions of lanthanum and manganese nitrates were nebulized for the deposition of LaMnO$_{3}$perovskite. The QMS, in real time, measuring the mass species formed before and after the nozzle, explained the reasons in the different values of T$_{e}$, T$_{v}$, and T$_{r}$ for the three gas mixtures as well as for the formation of oxides in the PETN from the aqueous nitrate solutions.
Starting Page	467
Ending Page	478
Page Count	12
File Format	PDF
ISSN	02724324
Journal	Plasma Chemistry and Plasma Processing
Volume Number	17
Issue Number	4
e-ISSN	15728986
Language	English
Publisher	Kluwer Academic Publishers-Plenum Publishers
Publisher Date	1997-01-01
Publisher Place	New York
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Inorganic Chemistry Characterization and Evaluation Materials Mechanics Nuclear Physics, Heavy Ions, Hadrons Mechanical Engineering
Content Type	Text
Resource Type	Article
Subject	Chemistry Surfaces, Coatings and Films Condensed Matter Physics Chemical Engineering

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