NDLI: Dependence of Ba(Zr$_{0.15}$Ti$_{0.85}$)O$_{3}$ films growth on substrate temperature and oxygen gas pressure prepared by pulsed laser deposition

Content Provider	Springer Nature Link
Author	Mahesh, M. L. V. James, A. R.
Copyright Year	2015
Abstract	Ferroelectric Ba(Zr$_{0.15}$Ti$_{0.85}$)O$_{3}$ (BZT) thin films were deposited on Pt/Ti/SiO$_{2}$/Si <111> substrates using Pulsed Laser Deposition technique. The effect of processing parameters such as substrate temperature and oxygen gas pressure on the structural properties of the films was analyzed. The experimental results showed that the films deposited at substrate temperature ≥600 °C, exhibited crystalline nature corresponding to perovskite phase structure. The mechanism explaining the dependence of the crystallinity of the BZT films on the substrate temperature is discussed. AFM data show the dependence of grain growth on oxygen partial pressure of the BZT thin films. The films deposited at 200 mT were found to have an average grain size of about 40 nm. The results were found to be in accordance with SEM analysis. Raman scattering spectral data were used to characterize the phonon modes of the BZT films at room temperature. Raman studies reveal the occurrence of multiple phases corresponding to the pinched-phase transition, reported to be possessed by the composition under study.
Starting Page	1
Ending Page	7
Page Count	7
File Format	PDF
ISSN	13880764
Journal	Journal of Nanoparticle Research
Volume Number	17
Issue Number	12
e-ISSN	1572896X
Language	English
Publisher	Springer Netherlands
Publisher Date	2015-12-12
Publisher Place	Dordrecht
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	BZT Thin films Pulsed laser deposition Oxygen vacancy Nanostructured layer Coating Nanotechnology Inorganic Chemistry Characterization and Evaluation of Materials Physical Chemistry Optics, Optoelectronics, Plasmonics and Optical Devices
Content Type	Text
Resource Type	Article
Subject	Chemistry Nanoscience and Nanotechnology Atomic and Molecular Physics, and Optics Condensed Matter Physics Bioengineering Modeling and Simulation

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