NDLI: Investigation of the optical and electrical properties of ZnO/Cu/ZnO multilayer structure for transparent conductive electrodes by magnetron sputtering

Content Provider	Springer Nature Link
Author	Wang, Linwen Chen, Wei dong Li, Ling
Copyright Year	2016
Abstract	In this paper, the ZnO/Cu/ZnO multilayer structure was deposited on glass substrate by magnetron sputtering. The influence of ZnO and Cu layer thickness on optical and electrical properties of multilayer structure was investigated. The X-ray diffraction, Field Emission Scanning Electron Microscopy and Atomic Force Microscopy were used to explore the crystal structure, surface morphology, respectively. The Perkin Elmer Lambda 950 double-beam spectrophotometer and 4-point Probes Resistivity Measurement System (RTS-9) were used to investigate the optical and electrical properties. The experiment and FDTD (finite-difference time-domain) simulation results indicated that the optical transmittance increased with increase of ZnO thickness in ranging from 20 to 60 nm at fixed thickness (10 nm) of Cu layer. The RTS-9 testing showed that the sheet resistance decreased from 30 to 6.5 Ω/sq with increase of Cu layer from 6 to 20 nm. However, the sheet resistance slightly changed with increase of ZnO thickness. The Haacke’s figure of merit (FOM) for all samples with various Cu thicknesses was also calculated. The highest value of FOM was 2.95 × 10$^{−3}$ (Ω$^{−1}$) in visible region (400–800 nm) when ZnO thickness was 60 nm and Cu thickness was 8 nm. In addition, the aging effect of FOM (stability) was also investigated with the changing of time in nature environment.
Starting Page	3458
Ending Page	3466
Page Count	9
File Format	PDF
ISSN	09574522
Journal	Journal of Materials Science: Materials in Electronics
Volume Number	28
Issue Number	4
e-ISSN	1573482X
Language	English
Publisher	Springer US
Publisher Date	2016-10-27
Publisher Place	New York
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Optical and Electronic Materials Characterization and Evaluation of Materials
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Biomaterials Biophysics Condensed Matter Physics Electronic, Optical and Magnetic Materials Bioengineering Electrical and Electronic Engineering Biomedical Engineering

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