NDLI: Assessment of refractive index changes by spectral reflectance in the first stages of Al$_{x}$Ga$

Content Provider	Springer Nature Link
Author	Benzarti, Z. Khelifi, M. Khalfallah, A. El Jani, B.
Copyright Year	2016
Abstract	Al$_{x}$Ga$_{1−x}$N films were grown using SiN treatment of sapphire substrate by metalorganic vapor phase epitaxy in a home-made vertical reactor. Al$_{x}$Ga$_{1−x}$N layer growth process was interrupted at successively steps to systematically investigate the first stages of Al$_{x}$Ga$_{1−x}$N layer growth. The growth process is monitored using real time in situ normal incident laser reflectance at wavelength λ = 632.8 nm. We have developed a semi-empirical optical model based on effective medium approach that takes account of an evolving interface roughness of a multilayer film structure during the growth process. The optical model along with an efficient least square fitting procedure are implemented in a computer program to extract the refractive index changes of the Al$_{x}$Ga$_{1−x}$N film structure from fitting ex situ multi-wavelength reflectivity signals at the transitional 3D–2D growth mode. Spectroscopic ellipsometry measurements are used to compare to refractive index predicted by this modelling. The simulation of in situ normal incident reflectivity signal is accurately achieved. Moreover, the reflectivity signal is fitted so as to extract the refractive index evolution during spontaneous cooling phase. The comparison between experimental results to those obtained from simulations corroborates the validity of the proposed approach in the case of similar conditions as those used in the present study.
Starting Page	6336
Ending Page	6346
Page Count	11
File Format	PDF
ISSN	09574522
Journal	Journal of Materials Science: Materials in Electronics
Volume Number	27
Issue Number	6
e-ISSN	1573482X
Language	English
Publisher	Springer US
Publisher Date	2016-02-24
Publisher Place	New York
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Optical and Electronic Materials Characterization and Evaluation of Materials
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Biomaterials Biophysics Condensed Matter Physics Electronic, Optical and Magnetic Materials Bioengineering Electrical and Electronic Engineering Biomedical Engineering

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