NDLI: Effect of discharge power density on the properties of Al and F co-doped ZnO thin films prepared at room temperature

Content Provider	Springer Nature Link
Author	Houng, Boen Chen, Han Bin
Copyright Year	2012
Abstract	ZnO transparent conducting thin films co-doped with aluminium and fluorine (AZO:F) were prepared on glass substrates by RF magnetron sputtering at room temperature. The effect of discharge power density on the microstructure, surface morphology, electrical and optical properties was investigated. From XRD analysis, it was revealed that the intensity of (002) favoured orientation of ZnO films increased with power density from 2.6 to 6.1 W/cm$^{2}$ and then turned to a randomly orientated structure as power density continuously increased to 7.8 W/cm$^{2}$. The film prepared at 6.1 W/cm$^{2}$ showed a better crystallization and microstructure with larger, pyramid-like grains that were approximately 180 nm long and 90 nm wide. As a result, the electrical resistivity of the AZO:F films had a minimum of 4.1 × 10$^{−4}$ Ωcm. The improvement in the electrical resistivity of AZO:F films was due to the increase in carrier concentration from 8.8 × 10$^{20}$ to 1.38 × 10$^{21}$ cm$^{−3}$ and the mobility from 5.8 to 11.8 cm$^{2}$ V$^{−1}$ s$^{−1}$. The increase in carrier concentration with power density was also found to affect the optical property of the films due to the Moss-Burstein shift.
Starting Page	1
Ending Page	7
Page Count	7
File Format	PDF
ISSN	13853449
Journal	Journal of Electroceramics
Volume Number	29
Issue Number	1
e-ISSN	15738663
Language	English
Publisher	Springer US
Publisher Date	2012-05-06
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	ZnO thin films Magnetron sputter Carrier concentration Electrical resistivity Ceramics, Glass, Composites, Natural Methods Optical and Electronic Materials Characterization and Evaluation of Materials Crystallography Electrochemistry
Content Type	Text
Resource Type	Article
Subject	Ceramics and Composites Materials Chemistry Mechanics of Materials Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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