NDLI: Effect of Strain Gradation on Luminescence and Electronic Properties of Pulsed Laser Deposited Zinc Oxide Thin Films

Content Provider	Springer Nature Link
Author	Rastogi, A. C. Desu, S. B. Bhattacharya, P. Katiyar, R. S.
Copyright Year	2004
Abstract	ZnO thin films were grown by ablation of a ZnO ceramic target using pulsed excimer laser (KrF) under 1 mTorr oxygen partial pressure over (0001) α -Al$_{2}$O$_{3}$ substrates held at 750_∘C. Highly c-axis oriented (0002) ZnO films with visible range optical transparency over 80% were obtained. Inhomogeneous distribution of strain in the film growth direction was studied by line shape analysis of X-ray diffraction and broad luminescence features centered on near band edge transition at 3.3 eV. Strain in the film adversely affects optical gain and excitonic threshold of UV emission. Post-growth oxygen annealing of films at 850°C for 1 h reduces strain and associated defects at ZnO film interface with (0001) Al$_{2}$O$_{3}$ substrate. FWHM of X-ray rocking curves show corresponding lowering from 12.5 arc min to 9.0 arc min signifying improved ZnO crystal quality. ω -rocking curves show line features with two superimposed peaks belonging to interfacial layer and bulk ZnO film. Graded strain in ZnO film is related to differently oriented interfacial layer formed at inception stage of film growth. Decrease in conductivity of annealed ZnO films show that O$_{2}$-vacancies are primary defects. Formation of strain free (0002) oriented optical quality ZnO films based on combined process of growth in low O$_{2}$ pressure and post growth anneal at high O$_{2}$ pressure is proposed for UV-optoelectronic applications.
Starting Page	345
Ending Page	352
Page Count	8
File Format	PDF
ISSN	13853449
Journal	Journal of Electroceramics
Volume Number	13
Issue Number	1-3
e-ISSN	15738663
Language	English
Publisher	Kluwer Academic Publishers
Publisher Date	2004-01-01
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	epitaxial ZnO films pulsed laser deposition ultraviolet light emission luminescence wide band gap Polymer Sciences Optical and Electronic Materials Characterization and Evaluation Materials Ceramics, Glass, Composites, Natural Methods Crystallography
Content Type	Text
Resource Type	Article
Subject	Ceramics and Composites Materials Chemistry Mechanics of Materials Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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