NDLI: A 1.8 V 828 μW 80 dB digital MEMS microphone

Content Provider	Springer Nature Link
Author	Jawed, Syed Arsalan Cattin, Davide Massari, Nicola Gottardi, Massimo Baschirotto, Andrea
Copyright Year	2011
Abstract	A single-package digital MEMS Capacitive Microphone (MCM) system is presented. The system consists of a MCM, which is wire-bonded with its readout interface (RI). The MCM sensor is fabricated using a combination of surface and bulk micromachining, employing diaphragm-stiffening to achieve piston-like diaphragm-movement and attaining required sensitivity with a smaller diaphragm-area. The RI is designed in 0.35 μm CMOS and it consists of a preamplifier (PAMP), a sigma-delta modulator (SDM), integrated biasing and digital control, converting the MCM capacitive variations into a single-bit over-sampled digital bitstream. The PAMP employs a two-terminal bootstrapped source-follower buffer to make the readout insensitive to the MCM parasitics, subsequently feeding a third-order single-loop single-bit modulator running at 2.5 MHz. The electrical measurements of the standalone RI demonstrate 55 dB A-weighted @ 1 Pa SNDR at the analog PAMP output and 80 dB A-weighted dynamic-range at the digital output, which corresponds to a conversion range from 40 to 120 dB SPL. The SNDR for acoustic measurements is 33 dB A-weighted @ 1 Pa, limited by the higher MCM thermal noise floor and reduced sensitivity (−53 dB V @ 1 Pa). The frequency characterization of the system for the complete audio-band demonstrates the effect of the system package towards higher frequencies (>9 kHz), giving rise to Helmholtz resonance, and reduction in sensitivity for low-frequencies (<400 Hz) because of acoustic short-circuiting inside the MCM due to flow-by slots. The complete system consumes 460 μA of total current for a 1.8 V single-supply. The total system dimensions are 4.5 × 2 mm2 (excluding the package), demonstrating the viability of a low-area, low-power and high dynamic-range implementation of digital MCM.
Starting Page	395
Ending Page	405
Page Count	11
File Format	PDF
ISSN	09251030
Journal	Analog Integrated Circuits and Signal Processing
Volume Number	67
Issue Number	3
e-ISSN	15731979
Language	English
Publisher	Springer US
Publisher Date	2011-01-15
Publisher Place	Boston
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	MEMS capacitive microphone Readout interface Low power low noise readout Sigma Delta modulator Circuits and Systems Electrical Engineering Signal, Image and Speech Processing
Content Type	Text
Resource Type	Article
Subject	Surfaces, Coatings and Films Signal Processing Hardware and Architecture

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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