NDLI: Fabrication and electroosmotic flow measurements in micro- and nanofluidic channels

Content Provider	Springer Nature Link
Author	Hug, Thomas S. Rooij, Nicolas F. de. Staufer, U.
Copyright Year	2005
Abstract	An easy method for fabricating micro- and nanofluidic channels, entirely made of a thermally grown silicon dioxide is presented. The nanochannels are up to 1-mm long and have widths and heights down to 200 nm, whereas the microfluidic channels are 20-μm wide and 4.8-μm high. The nanochannels are created at the interface of two silicon wafers. Their fabrication is based on the expansion of growing silicon dioxide and the corresponding reduction in channel cross-section. The embedded silicon dioxide channels were released and are partially freestanding. The transparent and hydrophilic silicon dioxide channel system could be spontaneously filled with aqueous, fluorescent solution. The electrical resistances of the micro- and nanofluidic channel segments were calculated and the found values were confirmed by current measurements. Electrical field strengths up to 600 V/cm were reached within the nanochannels when applying a potential of only 10 V. Electroosmotic flow (EOF) measurements through micro- and nanofluidic channel systems resulted in electroosmotic mobilities in the same order of those encountered in regular, fused silica capillaries.
Starting Page	117
Ending Page	124
Page Count	8
File Format	PDF
ISSN	16134982
Journal	Microfluidics and Nanofluidics
Volume Number	2
Issue Number	2
e-ISSN	16134990
Language	English
Publisher	Springer-Verlag
Publisher Date	2005-07-31
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Micro- and nanofluidic channels Electroosmotic flow Engineering Thermodynamics, Transport Phenomena Mechanics, Fluids, Thermodynamics Nanotechnology Polymer Sciences Medical Microbiology Engineering Fluid Dynamics
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Materials Chemistry Condensed Matter Physics Electronic, Optical and Magnetic Materials

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