NDLI: Surface modification-assisted bonding of 2D polymer-based nanofluidic devices

Content Provider	Springer Nature Link
Author	Cheng, E. Yin, Zhifu Zou, Helin Chen, Li
Copyright Year	2014
Abstract	An oxygen plasma-assisted thermal bonding technique is demonstrated for sealing a two-dimensional (2D) polymer-based nanofluidic device. A polymethyl methacrylate (PMMA) substrate with 2D nanochannels and polyethylene terephthalate (PET) cover plate with microchannels was treated with optimized oxygen plasma parameters: chamber pressure of 1 mbar, power of 30 W and time of 2 min. The effective bonding area and bonding strength were significantly improved under the optimized bonding temperature of 70 °C, pressure of 0.5 MPa and time of 10 min. Nanoindentation experiments showed that oxygen plasma treatment did not change the PET or the PMMA modulus, which provides a novel sampling method to observe the profile structures of the deformation of 2D nanochannels by scanning electron microscope. The 2D PMMA–PET nanofluidic device with 89 (±2) nm wide and 84 (±2) nm deep nanochannels was successfully bonded under optimized process parameters. The total dimension loss of the 2D nanochannels was estimated to be 2 (±4) nm in width and 12 (±4) nm in depth. The deformation loss in depth is mainly attributed to sagging of the PET cover plate (10 nm) during the thermal bonding process. Experiments with Rhodamine B solution showed good sealing properties of the polymer-based 2D nanofluidic device without leakages and clogging. This bonding process provides a high potential technique for fabrication of 2D polymer-based nanofluidic device with low deformation loss, low cost and high throughput.
Starting Page	527
Ending Page	535
Page Count	9
File Format	PDF
ISSN	16134982
Journal	Microfluidics and Nanofluidics
Volume Number	18
Issue Number	3
e-ISSN	16134990
Language	English
Publisher	Springer Berlin Heidelberg
Publisher Date	2014-06-29
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	2D nanofluidic devices Nanochannels Surface modification Thermal bonding Engineering Fluid Dynamics Biomedical Engineering Analytical Chemistry Nanotechnology and Microengineering
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Materials Chemistry Condensed Matter Physics Electronic, Optical and Magnetic Materials

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