NDLI: Glass reflow on 3-dimensional micro-apertures for electrophysiological measurements on-chip

Content Provider	Springer Nature Link
Author	Lehnert, T. Nguyen, D. M. T. Baldi, L. Gijs, M. A. M.
Copyright Year	2006
Abstract	We propose a new method to fabricate micro-apertures for on-chip electrophysiological measurements of living cells. Thermal reflow of phosphosilicate glass (PSG) is applied to funnel- or nozzle-type microstructures to generate very smooth surfaces on the finalized chip. Such 3-dimensional microstructures show close similarities to fire-polished glass pipette tips. Immobilized cells fit perfectly to these structures offering a large contact area for sealing between the cell membrane and the oxide surface. A tight cell/chip-aperture seal is an important requirement for the present application. We demonstrate the formation of stable gigaseals with Chinese hamster ovary (CHO) cells for both types of microstructures without the need of any post-fabrication surface treatment. By adjusting the PSG reflow parameters, the shape of the apertures can be modified and diameters down to the sub-micrometer range may be achieved. The application of PSG reflow to MEMS fabrication is an interesting new option to create unconventional microstructures.
Starting Page	109
Ending Page	117
Page Count	9
File Format	PDF
ISSN	16134982
Journal	Microfluidics and Nanofluidics
Volume Number	3
Issue Number	1
e-ISSN	16134990
Language	English
Publisher	Springer-Verlag
Publisher Date	2006-08-18
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Patch-clamp microsystem Micronozzle Microfunnel PSG reflow Engineering Thermodynamics, Transport Phenomena Mechanics, Fluids, Thermodynamics Nanotechnology Polymer Sciences Medical Microbiology Engineering Fluid Dynamics
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Materials Chemistry Condensed Matter Physics Electronic, Optical and Magnetic Materials

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