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| Content Provider | Springer Nature Link |
|---|---|
| Author | Nakatani, boru |
| Copyright Year | 1999 |
| Abstract | This paper describes heterodyne interferometers using orthogonally polarized and two-frequency shifted light sources of two types with super-high extinction ratio to reduce non-linearity of the interferometer due to polarization cross-talk. The acousto-optic modulators are used to shift light frequency. In the first interferometer the light source with Glan-Thomson prisms of very high extinction ratio (50 dB) is used to make the polarization cross-talk very small. In the second interferometer the light source of two-frequency shifted beams with small crossing angle (2.5 rnrad-10 mrad) is used to completely exclude non-linearity of the interferometer due to polarization cross-talk. By measuring the thickness of vacuum evaporation film, it was demonstrated that the interferometers are useful to measure thickness of a thin film in nanometer order. |
| Starting Page | 443 |
| Ending Page | 448 |
| Page Count | 6 |
| File Format | |
| ISSN | 13406000 |
| Journal | Optical Review |
| Volume Number | 6 |
| Issue Number | 5 |
| e-ISSN | 13499432 |
| Language | English |
| Publisher | Springer-Verlag |
| Publisher Date | 1999-01-01 |
| Publisher Place | Berlin, Heidelberg |
| Access Restriction | One Nation One Subscription (ONOS) |
| Subject Keyword | heterodyne interferometer frequency shifted light source high extinction ratio non-linearity polarization cross-talk Electromagnetism, Optics and Lasers |
| Content Type | Text |
| Resource Type | Article |
| Subject | Atomic and Molecular Physics, and Optics |
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