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Heterodyne Interferometers Using Orthogonally Polarized and Two-Frequency Shifted Light Sources with Super-high Extinction Ratio
| Content Provider | Semantic Scholar |
|---|---|
| Author | Nakatani, Noboru |
| Copyright Year | 1999 |
| Abstract | This paper describes heterodyne interferometers using orthogonally polarized and two-frequency shifted light sources of two types with super-high extinction ratio to reduce non-linearity of the interferometer due to polarization cross-talk. The acousto-optic modulators are used to shift light frequency. In the first interferometer the light source with Glan-Thomson prisms of very high extinction ratio (50 dB) is used to make the polarization cross-talk very small. In the second interferometer the light source of two-frequency shifted beams with small crossing angle (2.5 rnrad-10 mrad) is used to completely exclude non-linearity of the interferometer due to polarization cross-talk. By measuring the thickness of vacuum evaporation film, it was demonstrated that the interferometers are useful to measure thickness of a thin film in nanometer order. |
| Starting Page | 443 |
| Ending Page | 448 |
| Page Count | 6 |
| File Format | PDF HTM / HTML |
| DOI | 10.1007/s10043-999-0443-3 |
| Volume Number | 6 |
| Alternate Webpage(s) | https://page-one.springer.com/pdf/preview/10.1007/s10043-999-0443-3 |
| Alternate Webpage(s) | https://doi.org/10.1007/s10043-999-0443-3 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
