NDLI: Fabrication of steel roller imprinting molds through adapting conventional planar micro fabrication tools

Content Provider	Springer Nature Link
Author	Huang, Meng Chi Fu, Chien Chung
Copyright Year	2010
Abstract	A soft lithography process has been developed to transfer a pattern directly from a flat PDMS stamp to a stainless steel cylindrical substrate using an SAM ink, without any need to physically attach the stamp to a roller. The process uses standard semiconductor wafer processing equipment, along with specially designed elements to adapt to the cylindrical substrates. The entire process can be applied to batch processing and thus can be directly applied to manufacturing. This technique was demonstrated by fabricating a steel herringbone journal bearing with a diameter of 1.5 mm. The HGJB is an important element which is used for high-speed rotating spindles of electro-mechanical systems such as hard disk drives, CD-Rom drives, and DVD drives in the consumer electronics industry. In this case, the pattern had a dimension of 85 microns and depth of 3 microns. Features as deep as ten microns and as narrow as two microns have been also demonstrated.
Starting Page	1845
Ending Page	1853
Page Count	9
File Format	PDF
ISSN	09467076
Journal	Microsystem Technologies
Volume Number	16
Issue Number	11
e-ISSN	14321858
Language	English
Publisher	Springer-Verlag
Publisher Date	2010-07-30
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Electronics and Microelectronics, Instrumentation Mechanical Engineering Nanotechnology
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture

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