NDLI: Fabrication of optically smooth, through-wafer silicon molds for PDMS total internal reflection-based devices

Content Provider	Springer Nature Link
Author	Le, Nam Cao Hoai Dao, Dzung Viet Yokokawa, Ryuji Wells, John C. Sugiyama, Susumu
Copyright Year	2009
Abstract	This paper presents a systematic approach to fabricate optically smooth, through-wafer silicon (Si) molds for polymer optical devices, in particular poly(dimethylsiloxane) (PDMS) total internal reflection (TIR)-based devices. First, the Si molds were fabricated by an optimized, through-wafer deep reactive ion etching (DRIE) process to achieve small roughness. To further reduce the roughness, the Si molds were then oxidized and etched in BHF for three times to achieve surface roughness average (R a) and root mean square (RMS) roughness below 25 nm while peak-to-valley (P–V) roughness is below 150 nm. We monitored the surface roughness and morphology of the sidewalls of Si mold through three cycles of oxidation and BHF etching using field emission scanning electron microscopy (FESEM) and atomic force microscopy (AFM). We found that further oxidation and BHF etching might not have much effect in further reducing the roughness while the device feature definitions might be compromised. Finally, the PDMS TIR-based devices replicated from the Si molds were evaluated by means of FESEM, AFM and by imaging of the fluorescent evanescent spots.
Starting Page	1845
Ending Page	1853
Page Count	9
File Format	PDF
ISSN	09467076
Journal	Microsystem Technologies
Volume Number	15
Issue Number	12
e-ISSN	14321858
Language	English
Publisher	Springer-Verlag
Publisher Date	2009-08-22
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Electronics and Microelectronics, Instrumentation Mechanical Engineering Nanotechnology
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture

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