NDLI: Progress in magnetic microactuators

Content Provider	Springer Nature Link
Author	Guckel, H.
Copyright Year	1998
Abstract	Magnetic microactuator construction has benefited from two processing extensions: stacking in the vertical and horizontal direction and multiple X-ray mask sacrificial layer LIGA. Vertical stacking requires height control of electroplated structures. This has been achieved by material insensitive lapping and polishing techniques. Structural heights of more than 1 mm have been achieved with 300 μm low-energy exposures. This has resulted in actuators with output forces to 100 mN and throws to 2 mm.Re-planarization after electroplating without photoresist damage enables second layer photoresist application via solvent bonding and fly cutting. Exposure of the substrate with a second X-ray mask becomes useful if the second mask can be aligned to the substrate. This has been accomplished with sufficient accuracy via mechanical techniques.A variety of magnetic actuators have been constructed. All of them use assembled rather than integrated coils. The performance of the assembled coils is adequate for position sensing in linear actuators and has resulted in a closed loop control device.
Starting Page	59
Ending Page	61
Page Count	3
File Format	PDF
ISSN	09467076
Journal	Microsystem Technologies
Volume Number	5
Issue Number	2
e-ISSN	14321858
Language	English
Publisher	Springer-Verlag
Publisher Date	1998-12-08
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Shape memory microactuators

Hard and soft magnetic materials for electromagnetic microactuators

Integrated electromagnetic microactuators with a large driving force

Optimal design analysis of electrothermally driven microactuators

Fabrication of functional components for electromagnetic microactuators

High-speed visualization, a powerful diagnostic tool for microactuators – retrospect and prospect

A hybrid surface tension seal for pneumatic and hydraulic microactuators

Microsensor packaging

Microsystem Technologies

Progress in magnetic microactuators

Similar Documents

Shape memory microactuators

Hard and soft magnetic materials for electromagnetic microactuators

Integrated electromagnetic microactuators with a large driving force

Optimal design analysis of electrothermally driven microactuators

Fabrication of functional components for electromagnetic microactuators

High-speed visualization, a powerful diagnostic tool for microactuators – retrospect and prospect

A hybrid surface tension seal for pneumatic and hydraulic microactuators

Microsensor packaging

Microsystem Technologies

Progress in magnetic microactuators