NDLI: Optimal design analysis of electrothermally driven microactuators

Content Provider	Springer Nature Link
Author	Karbasi, Seyed Majid Shamshirsaz, Mahnaz Naraghi, Mahyar Maroufi, Mohammad
Copyright Year	2009
Abstract	This paper explores a comparative study between different designs of electrothermal microactuators with emphasis on optimal design and performance key factors. For this purpose, two typical designs for electrothermal microactuators with the same material properties are studied: one with different beam lengths (design A), other one with different beam sections and a flexure part (design B). Analytical model and finite element model (FEM) have been developed and validated by comparison of simulation results with experimental results in literature. Optimal geometrical dimensions to achieve maximum deflection have been obtained using genetic algorithm (GA). As the key factors, temperature distribution, power consumption and deflection of these microactuators have been compared in the range of microactuator functionality. Design B is more sensitive to geometrical dimension variation. Using optimal geometrical dimensions, an increase of almost 40 and 55% has been achieved for design A and B tip deflections, respectively. The modified design A with a gold layer results to an increase of 70% for tip deflection comparing to its optimal design.
Starting Page	1065
Ending Page	1071
Page Count	7
File Format	PDF
ISSN	09467076
Journal	Microsystem Technologies
Volume Number	16
Issue Number	7
e-ISSN	14321858
Language	English
Publisher	Springer-Verlag
Publisher Date	2009-12-18
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Electronics and Microelectronics, Instrumentation Mechanical Engineering Nanotechnology
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture

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