NDLI: Fabrication and experimental study of Al2O3-TiC sliders with piezoelectric nanoactuators for flying height control

Content Provider	Springer Nature Link
Author	Juang, Jia Yang Ambekar, Rohit P. Bogy, David B. Bhatia, C. Singh
Copyright Year	2006
Abstract	A gap flying height (FH) of less than 5 nm between the read/write element and the surface of the disk is required for ultrahigh density recording. A stable and constant FH must also be sustained in the presence of altitude and temperature changes and manufacturing tolerance. A FH adjustment or controlled slider that is capable of adjusting its gap FH has been proposed previously. In this paper we demonstrate an inexpensive and low-temperature approach for integrating piezoelectric materials in the fabrication of current small form-factor Al2O3-TiC sliders. A bulk PZT sheet is bonded onto the back of row-bars and the sliders are separated by a standard dicing process. It requires no deep reactive-ion etching (DRIE) or high temperature processes and is suitable for mass production. A conventional design and a new special air bearing surface (ABS) design have been fabricated and tested by an optical profiler and a FH tester. A nonflying actuation stroke of 0.6–0.8 nm/V has been observed. The FH measurements showed that the ABS plays a key role in increasing the actuation efficiency, which also agrees well with the numerical analysis.
Starting Page	751
Ending Page	757
Page Count	7
File Format	PDF
ISSN	09467076
Journal	Microsystem Technologies
Volume Number	13
Issue Number	8-10
e-ISSN	14321858
Language	English
Publisher	Springer-Verlag
Publisher Date	2006-10-12
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Operating Procedures, Materials Treatment Mechanical Engineering Nanotechnology Electronics and Microelectronics, Instrumentation
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering Hardware and Architecture

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Fabrication and experimental study of Al2O3-TiC sliders with piezoelectric nanoactuators for flying height control

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