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Fabrication and experimental study of Al2O3-TiC sliders with piezoelectric nanoactuators for flying height control
| Content Provider | Semantic Scholar |
|---|---|
| Author | Juang, Jia-Yang Ambekar, Rohit P. Bogy, David B. Bhatia, Charanjit Singh |
| Copyright Year | 2007 |
| Abstract | A gap flying height (FH) of less than 5 nm between the read/write element and the surface of the disk is required for ultrahigh density recording. A stable and constant FH must also be sustained in the presence of altitude and temperature changes and manufacturing tolerance. A FH adjustment or controlled slider that is capable of adjusting its gap FH has been proposed previously. In this paper we demonstrate an inexpensive and low-temperature approach for integrating piezoelectric materials in the fabrication of current small form-factor Al2O3-TiC sliders. A bulk PZT sheet is bonded onto the back of row-bars and the sliders are separated by a standard dicing process. It requires no deep reactive-ion etching (DRIE) or high temperature processes and is suitable for mass production. A conventional design and a new special air bearing surface (ABS) design have been fabricated and tested by an optical profiler and a FH tester. A nonflying actuation stroke of 0.6–0.8 nm/V has been observed. The FH measurements showed that the ABS plays a key role in increasing the actuation efficiency, which also agrees well with the numerical analysis. |
| Starting Page | 751 |
| Ending Page | 757 |
| Page Count | 7 |
| File Format | PDF HTM / HTML |
| DOI | 10.1007/s00542-006-0268-y |
| Volume Number | 13 |
| Alternate Webpage(s) | http://homepage.ntu.edu.tw/~jiayang/papers/2007FabricationAndExperimentalStudy.pdf |
| Alternate Webpage(s) | https://doi.org/10.1007/s00542-006-0268-y |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
