NDLI: Heuristic scheduling policies for a semiconductor wafer fabrication facility: minimizing variation of cycle times

Content Provider	Springer Nature Link
Author	Yoon, Hyun Joong Kim, Jin Gon
Copyright Year	2013
Abstract	This paper presents heuristic scheduling policies for semiconductor wafer fabrication facilities. The proposed heuristic scheduling policies include the advanced operation due date (OPNDD) for a sequence control policy and the adaptive constant work-in-process (CONWIP) for an input release control policy. The objective of the proposed scheduling policies is to reduce the variation of cycle times in the wafer fab. The advanced OPNDD sets the higher priority to the front opening unified pod (FOUP) with the smallest operation due date that is computed using a generalized stochastic Petri net model, and at the same time regulates the queue lengths of the FOUPs in each stoker by preventing excessive queue lengths in bottleneck workstations. The adaptive CONWIP controls dynamically the input release time of FOUPs using the adaptive WIP level according to the current status of the wafer fab. The simulation experiments show that the proposed scheduling method is efficient in reducing the variation of cycle times.
Starting Page	171
Ending Page	180
Page Count	10
File Format	PDF
ISSN	02683768
Journal	The International Journal of Advanced Manufacturing Technology
Volume Number	67
Issue Number	1-4
e-ISSN	14333015
Language	English
Publisher	Springer-Verlag
Publisher Date	2013-01-23
Publisher Place	London
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Scheduling Semiconductor Wafer fab Generalized stochastic Petri nets Industrial and Production Engineering Production/Logistics/Supply Chain Mechanical Engineering Computer-Aided Engineering (CAD, CAE) and Design
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Mechanical Engineering Computer Science Applications Software

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