NDLI: Effect of process parameters in nanosecond pulsed laser micromachining of PMMA-based microchannels at near-infrared and ultraviolet wavelengths

Content Provider	Springer Nature Link
Author	Teixidor, Daniel Orozco, Francisco Thepsonthi, Thangsak Ciurana, Joaquim Rodríguez, Ciro A. Özel, Tuğrul
Copyright Year	2012
Abstract	This paper presents investigations on the effects of nanosecond laser processing parameters on depth and width of microchannels fabricated from polymethylmethacrylate (PMMA) polymer. A neodymium-doped yttrium aluminium garnet pulsed laser with a fundamental wavelength of 1,064 nm and a third harmonic wavelength of 355 nm with pulse duration of 5 ns is utilized. Hence, experiments are conducted at near-infrared (NIR) and ultraviolet (UV) wavelengths. The laser processing parameters of pulse energy (402–415 mJ at NIR and 35–73 mJ at UV wavelengths), pulse frequency (8–11 Hz), focal spot size (140–190 μm at NIR and 75 μm at UV wavelengths) and scanning rate (400–800 pulse/mm at NIR and 101–263 pulse/mm at UV wavelengths) are varied to obtain a wide range of fluence and processing rate. Microchannel width and depth profile are measured, and main effects plots are obtained to identify the effects of process parameters on channel geometry (width and depth) and material removal rate. The relationship between process variables (width and depth of laser-ablated microchannels) and process parameters is investigated. It is observed that channel width (140–430 μm at NIR and 100–150 μm at UV wavelengths) and depth (30–120 μm at NIR and 35–75 μm at UV wavelengths) decreased linearly with increasing fluence and increased non-linearly with increasing scanning rate. It is also observed that laser processing at UV wavelength provided more consistent channel profiles at lower fluences due to higher laser absorption of PMMA at this wavelength. Mathematical modeling for predicting microchannel profile was developed and validated with experimental results obtained with pulsed laser micromachining at NIR and UV wavelengths.
Starting Page	1651
Ending Page	1664
Page Count	14
File Format	PDF
ISSN	02683768
Journal	The International Journal of Advanced Manufacturing Technology
Volume Number	67
Issue Number	5-8
e-ISSN	14333015
Language	English
Publisher	Springer London
Publisher Date	2012-11-14
Publisher Place	London
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Laser micromachining Ablation Polymethylmethacrylate Process modeling Microfluidics Industrial and Production Engineering Production/Logistics/Supply Chain Mechanical Engineering Computer-Aided Engineering (CAD, CAE) and Design
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Mechanical Engineering Computer Science Applications Software

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