NDLI: Finite element simulation and experimental study on the through-mask electrochemical micromachining (EMM) process

Content Provider	Springer Nature Link
Author	Li, Wang Quandai, Wang Xiuqing, Hao Yucheng, Ding Bingheng, Lu
Copyright Year	2010
Abstract	In this work, the influence of electrode surface patterning on shape evolution in through-mask electrochemical micromachining (EMM) process is investigated numerically and experimentally. With finite element method, the anodic dissolution process is predicted and the etching behavioral trends under various parameters involving spacing and opening ratio, mask aspect ratio, and the etched feature aspect ratio have been identified and interpreted in which the etched depth non-uniformity is mostly ascribed to the current aggregate effect due to surface patterning on substrate. The validation experiment is conducted and the procedure of island formation and disappearing gradually along with etching progress in the center of the etched region is observed, which is in good agreement with the numerical calculation prediction. With the combination of experiments and numerical simulation, the optimized electroetching conditions and the formulation of the electrolyte in through-mask EMM are achieved, with which the ordered microstructures with a feature size down to 15 μm and smooth etched surface in large scale are obtained.
Starting Page	155
Ending Page	162
Page Count	8
File Format	PDF
ISSN	02683768
Journal	The International Journal of Advanced Manufacturing Technology
Volume Number	51
Issue Number	1-4
e-ISSN	14333015
Language	English
Publisher	Springer-Verlag
Publisher Date	2010-04-13
Publisher Place	London
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Through-mask electrochemical micromachining Current aggregate effect Finite element simulation Shape evolution Computer-Aided Engineering (CAD, CAE) and Design Mechanical Engineering Production/Logistics Industrial and Production Engineering
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Mechanical Engineering Computer Science Applications Software

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