NDLI: Fabrication of PDMS micro through-holes for electrochemical micromachining

Content Provider	Springer Nature Link
Author	Qu, Ningsong Chen, Xiaolei Li, Hansong Zhu, Di
Copyright Year	2014
Abstract	Surface texture has played a fundamental role in the development of many advanced fields. Through mask electrochemical micromachining (TMEMM) is a feasible alternative for fabricating surface textures. In this paper, polydimethylsiloxane (PDMS) is firstly employed as a mask in TMEMM due to its chemical resistance, low cost, flexibility and high moulding capability. A simple method for fabricating PDMS micro through-holes is proposed. A vacuum-aided process was introduced to fill a PDMS gel into an SU-8 mould, and the PDMS gel was solidified in an oven. Then, the cured PDMS micro through-holes were peeled off of the SU-8 mould. PDMS micro holes with a minimum diameter of 50 μm and a thickness of 200 μm were obtained. Furthermore, the PDMS micro through-holes were then used as a mask to prepare a micro dimple array by TMEMM. Experiments were conducted to verify the feasibility of the proposed approach, and the effect of applied voltage and machining time on the diameter and depth of the micro dimple was investigated. Finally, an array of micro dimples 109 μm in diameter and 9.7 μm deep was successfully fabricated by using PDMS.
Starting Page	487
Ending Page	494
Page Count	8
File Format	PDF
ISSN	02683768
Journal	The International Journal of Advanced Manufacturing Technology
Volume Number	72
Issue Number	1-4
e-ISSN	14333015
Language	English
Publisher	Springer London
Publisher Date	2014-02-19
Publisher Place	London
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Surface texture Electrochemical micromachining PDMS Micro through-holes Micro dimple array Industrial and Production Engineering Production/Logistics/Supply Chain Mechanical Engineering Computer-Aided Engineering (CAD, CAE) and Design
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Mechanical Engineering Computer Science Applications Software

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