NDLI: A spiral scanning probe system for micro-aspheric surface profile measurement

Content Provider	Springer Nature Link
Author	Shibuya, A. Arai, Y. Yoshikawa, Y. Gao, W. Nagaike, Y. Nakamura, Y.
Copyright Year	2008
Abstract	This paper presents a novel spiral scanning probe measurement system which is developed to achieve precise profile measurements of micro-aspheric surfaces. The system consists of a scanning stage (a spindle and a linear slide) and a contact-type displacement sensor. The contact-type sensor is employed for the scanning of the micro-aspheric surface. The micro-aspheric object is set on the spindle, and the contact-type displacement sensor is set on the linear slide. The motions of the spindle and the linear slide are controlled synchronously so that the micro-aspheric object is scanned spirally for high-speed measurement. The motions of the stage are used as the scanning datum for the profile measurement. Because the error motions of the stage are estimated to be on the order of tens of nanometer, these errors are measured and compensated to achieve precise measurements. The alignment error between the spindle rotation axis and the probe tip of the contact-type displacement sensor, which is called the centering error, is confirmed to cause considerable measurement error of the micro-aspheric surface profile. Methods are proposed to make the alignment accurately. Experiments of surface profile measurement of a micro-aspheric lens are also carried out in the measurement system.
Starting Page	845
Ending Page	862
Page Count	18
File Format	PDF
ISSN	02683768
Journal	The International Journal of Advanced Manufacturing Technology
Volume Number	46
Issue Number	9-12
e-ISSN	14333015
Language	English
Publisher	Springer-Verlag
Publisher Date	2008-11-26
Publisher Place	London
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Precision metrology Profile measurement Aspheric surface Scanning probe measurement method Spiral scanning Centering error Contact-type displacement sensor Computer-Aided Engineering (CAD, CAE) and Design Mechanical Engineering Production/Logistics Industrial and Production Engineering
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Mechanical Engineering Computer Science Applications Software

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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