NDLI: Analysis and control of micro-cantilever in dynamic mode AFM

Content Provider	Springer Nature Link
Author	Korayem, Moharam Habibnejad Zafari, S. Amanati, A. Damircheli, M. Ebrahimi, N.
Copyright Year	2010
Abstract	The dynamic behavior of micro-cantilever-sample system in atomic force microscopy (AFM) in tapping operational mode is studied. Micro-cantilever is modeled by single-mode approximation and subjected to sinusoidal force input. The interaction between tip and sample is modeled by Lennard–Jones potential. Using this dynamic model, the phase portrait of the system is obtained for a range of cantilever-sample distance, and the effect of cantilever parameters on predictability of the system is discussed. Then the nonlinear behavior of the cantilever-sample system is controlled by a robust sliding-mode controller. System output is designed to track the sinusoidal stimulation of the cantilever base under sample surface perturbation during scanning process. Results of SMC are simulated in MATLAB and compared to a stability that has been proved by PID controller which shows better controller effort and less cantilever tip position accuracy.
Starting Page	979
Ending Page	990
Page Count	12
File Format	PDF
ISSN	02683768
Journal	The International Journal of Advanced Manufacturing Technology
Volume Number	50
Issue Number	9-12
e-ISSN	14333015
Language	English
Publisher	Springer-Verlag
Publisher Date	2010-03-19
Publisher Place	London
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	Dynamics Micro-cantilever AFM Lennard–Jones Sliding mode Computer-Aided Engineering (CAD, CAE) and Design Mechanical Engineering Production/Logistics Industrial and Production Engineering
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Mechanical Engineering Computer Science Applications Software

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