NDLI: Differentiated preemptive dispatching for automatic materials handling services in 300 mm semiconductor foundry

Content Provider	Springer Nature Link
Author	Liao, Da Yin Wang, Chia Nan
Copyright Year	2005
Abstract	Highly automated materials handling in 300 mm semiconductor manufacturing is one of the biggest concerns to foundry practitioners because effective coordination among efficient manual operations has been the core competence in their 200 mm manufacturing successful stories. It is still very challenging to provide almost no-wait transport to hot lots (high priority lots) in an automatic materials handling production environment. This paper proposes an effective overhead hoist transport (OHT) dispatching rule, differentiated preemptive dispatching (DPD) policy, to reduce the possible blocking effects during the transportation of hot lots in a 300 mm OHT system. The dispatching objective is to minimize the delivery time of hot lots while minimizing the impact to the transport of normal lots. Simulation experiments based on realistic data from a local 300 mm foundry fab are conducted. Numerical results demonstrate that the DPD rule can effectively expedite the movements of hot lots. The proposed DPD rule is very useful to hot lots management and shop floor control functions, like scheduling and dispatching, in a 300 mm fab-wide automated production environment.
Starting Page	890
Ending Page	896
Page Count	7
File Format	PDF
ISSN	02683768
Journal	The International Journal of Advanced Manufacturing Technology
Volume Number	29
Issue Number	9-10
e-ISSN	14333015
Language	English
Publisher	Springer-Verlag
Publisher Date	2005-12-21
Publisher Place	Berlin, Heidelberg
Access Restriction	One Nation One Subscription (ONOS)
Subject Keyword	AMHS Hot lot OHT Semiconductor manufacturing 300 mm Computer-Aided Engineering (CAD, CAE) and Design Mechanical Engineering Industrial and Production Engineering Production/Logistics
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Control and Systems Engineering Mechanical Engineering Computer Science Applications Software

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