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Wafer scale production of carbon nanotube scanning probe tips for atomic force microscopy
| Content Provider | Semantic Scholar |
|---|---|
| Author | Yenilmez, Erhan Wang, Qian Chen, Robert Pin-Chuan Wang, Dunwei Dai, Hongjie |
| Copyright Year | 2002 |
| Abstract | A methodology is developed to enable wafer scale fabrication of single-walled carbon nanotube (SWNT) tips for atomic force microscopy. Catalyst selectively placed onto 375 prefabricated Si tips on a wafer is made possible by a simple patterning technique. Chemical vapor deposition on the wafer scale leads to the growth of SWNTs protruding from more than 90% of the Si tips. This represents an important step towards the scale up of nanotube probe tips for advanced nanoscale imaging of solid-state and soft biological systems and for scanning probe lithography. |
| Starting Page | 2225 |
| Ending Page | 2227 |
| Page Count | 3 |
| File Format | PDF HTM / HTML |
| DOI | 10.1063/1.1464227 |
| Volume Number | 80 |
| Alternate Webpage(s) | http://dailab.stanford.edu/Reprint/44.%20Wafer%20scale%20production%20of%20carbon%20nanotube%20scanning%20probe%20tips%20for%20atomic.pdf |
| Alternate Webpage(s) | https://doi.org/10.1063/1.1464227 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
