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Microstructure and thermoelectric properties of CrN and CrN / Cr 2 N thin films
| Content Provider | Semantic Scholar |
|---|---|
| Author | Gharavi Kerdsongpanya Schmidt, Eric Eriksson Nong Balke Fournier Belliard Febvrier, Le Pallier |
| Copyright Year | 2018 |
| Abstract | CrN thin films with an N/Cr ratio of 95% were deposited by reactive magnetron sputtering onto (0 0 0 1) sapphire substrates. X-ray diffraction and pole figure texture analysis show CrN (1 1 1) epitaxial growth in a twin domain fashion. By changing the nitrogen versus argon gas flow mixture and the deposition temperature, thin films with different surface morphologies ranging from grainy rough textures to flat and smooth films were prepared. These parameters can also affect the CrNx system, with the film compound changing between semiconducting CrN and metallic Cr2N through the regulation of the nitrogen content of the gas flow and the deposition temperature at a constant deposition pressure. Thermoelectric measurements (electrical resistivity and Seebeck coefficient), scanning electron microscopy, and transmission electron microscopy imaging confirm the changing electrical resistivity between 0.75 and 300 mΩ cm, the changing Seebeck coefficient values between 140 and 230 μVK−1, and the differences in surface morphology and microstructure as higher temperatures result in lower electrical resistivity while gas flow mixtures with higher nitrogen content result in single phase cubic CrN. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://liu.diva-portal.org/smash/get/diva2:1241095/FULLTEXT01.pdf |
| Language | English |
| Access Restriction | Open |
| Subject Keyword | 3D film Alloys Argon Certified Registered Nurse (occupation) Chemical vapor deposition Chromium Coefficient Crystal structure Cubic function Differential Thermal Analysis Electric Conductivity Embedded system Embedding Epitaxy Gases Jaccard index Liquid-crystal display Mathematical morphology Randomness Reaching Scanning Electron Microscopy Semiconductor Semiconductors Sputter deposition Transmission Electron Microscopy chromic chloride mixture newton |
| Content Type | Text |
| Resource Type | Article |
