NDLI: Synthesis and characterization of CrN / Mo 2 N multilayers and phases of Molybdenum nitride

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Synthesis and characterization of CrN / Mo 2 N multilayers and phases of Molybdenum nitride

Content Provider	Semantic Scholar
Author	Koshy, Robin Abraham Graham, Michael E. Marks, Laurence D.
Copyright Year	2007
Abstract	CrNx, MoNx, CrOx, MoOx and CrN/Mo2N multilayer films were deposited by reactive sputtering. Characterization of the coatings was carried out using XRD, XPS, optical profilometer, and nano-indentation. The oxidation of the thin films was studied as a function of annealing temperature. Tribological characterization of the Cr2O3 and the Mo-oxides was carried out as a function of annealing temperature. The low friction behavior of MoOx and MoNx was demonstrated. The deposition of CrNx and MoNx was also characterized and multilayer deposition of CrN and Mo2N was carried out. The hardness ofMo2N and CrN and the multilayers were shown to lie in the 20–30 GPa hardness regime. The multilayers are stable up to 500 °C in air and up to 1000 °C in argon. Initial friction testing on the multilayer coatings showed an activated self-lubricating mechanism. © 2007 Elsevier B.V. All rights reserved.
File Format	PDF HTM / HTML
Alternate Webpage(s)	http://www.numis.northwestern.edu/Research/Articles/2007/koshy.pdf
Language	English
Access Restriction	Open
Subject Keyword	3D film Argon Built-in test equipment Certified Registered Nurse (occupation) Chemical vapor deposition Chromium Coating Excipient Fever Friction GNU nano Guilty Gear Xrd Hardness Tests IBM Notes Molybdenum One Thousand Open XML Paper Specification Simulated annealing Sputter deposition Sulfur Oxides X-Ray Photoelectron Spectroscopy anatomical layer molybdenum trioxide negative regulation of iron-sulfur-molybdenum cofactor assembly oxidation
Content Type	Text
Resource Type	Article

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