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Sub-kT/q switching in In2O3 nanowire negative capacitance field-effect transistors.
| Content Provider | Semantic Scholar |
|---|---|
| Author | Su, Meng Zou, Xuming Gong, Youning Wang, Jianlu Liu, Yuan Ho, Johnny Chung Yin Liu, Xingqiang Liao, Lei |
| Copyright Year | 2018 |
| Abstract | Limited by the Boltzmann distribution of electrons, the sub-threshold swing (SS) of conventional MOSFETs cannot be less than 60 mV dec-1. This limitation hinders the reduction of power dissipation of the devices. Herein, we present high-performance In2O3 nanowire (NW) negative capacitance field-effect transistors (NC-FETs) by introducing a ferroelectric P(VDF-TrFE) layer in a gate dielectric stack. The fabricated devices exhibit excellent gate modulation with a high saturation current density of 550 μA μm-1 and an outstanding SS value less than 60 mV dec-1 for over 4 decades of channel current. The assembled inverter circuit can demonstrate an impressive voltage gain of 25 and a cut-off frequency of over 10 MHz. By utilizing the self-aligned fabrication scheme, the device can be ultimately scaled down to below 100 nm channel length. The devices with 200 nm channel length exhibit the best performances, in which a high on/off current ratio of >107, a large output current density of 960 μA μm-1 and a small SS value of 42 mV dec-1 are obtained at the same time. All these would not only evidently demonstrate the potency of NW NC-FETs to break through the Boltzmann limit in nanoelectronics, but also open up a new avenue to low-power transistors for portable products. |
| Starting Page | 19131 |
| Ending Page | 19139 |
| Page Count | 9 |
| File Format | PDF HTM / HTML |
| DOI | 10.1039/c8nr06163g |
| Alternate Webpage(s) | https://hocityu.com/publications_files/Nanoscale_2018_Sub-60mV%20dec-1%20NW%20Transistors.pdf |
| PubMed reference number | 30298891 |
| Alternate Webpage(s) | https://doi.org/10.1039/c8nr06163g |
| Journal | Medline |
| Volume Number | 10 |
| Issue Number | 40 |
| Journal | Nanoscale |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |