Loading...
Please wait, while we are loading the content...
Density dependence of the room temperature thermal conductivity of atomic layer deposition-grown amorphous alumina ( Al 2 O 3 )
| Content Provider | Semantic Scholar |
|---|---|
| Author | Gorham, Caroline S. Gaskins, John T. Parsons, Gregory N. Losego, Mark D. Hopkins, Patrick E. |
| Copyright Year | 2014 |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://www.andrew.cmu.edu/user/caroling/papers/gorham_density_2014.pdf |
| Alternate Webpage(s) | https://patrickehopkins.files.wordpress.com/2011/02/gorham2014aa.pdf |
| Language | English |
| Access Restriction | Open |
| Subject Keyword | Aluminum Hydroxide Aluminum Oxide Atomic layer deposition Chemical vapor deposition Dependence Thermal Conductivity |
| Content Type | Text |
| Resource Type | Article |