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Subwavelength grating couplers for efficient light coupling into silicon nanomembrane based photonic devices
| Content Provider | Semantic Scholar |
|---|---|
| Author | Subbaraman, Harish Xu, Xiaochuan Covey, John Chen, Ray T. |
| Copyright Year | 2013 |
| Abstract | We demonstrate efficient coupling of light into silicon nanomembrane (SiNM) based photonic devices using a subwavelength grating (SWG) coupler. Our designed 17.1 μm x 10 μm grating couplers are fabricated at the input and the output of 8 mm x 2.5 μm SiNM waveguides on a glass substrate. A high coupling efficiency of 39.2% is achieved at a wavelength of 1555.56 nm. The 1-dB and 3-dB bandwidths are measured to be 29 nm and 57 nm, respectively. Peak efficiency variation of 0.26 dB is observed from a measurement of 5 grating pairs. Such grating couplers open limitless possibilities for the development of high performance nanomembrane based photonic devices. |
| File Format | PDF HTM / HTML |
| DOI | 10.1117/12.2004707 |
| Volume Number | 8630 |
| Alternate Webpage(s) | http://chen-server.mer.utexas.edu/2013/HarishPW2013-1.pdf |
| Alternate Webpage(s) | https://doi.org/10.1117/12.2004707 |
| Journal | Photonics West - Optoelectronic Materials and Devices |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
