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Efficient light coupling into in-plane semiconductor nanomembrane photonic devices utilizing a sub-wavelength grating coupler.
| Content Provider | Semantic Scholar |
|---|---|
| Author | Subbaraman, Harish Xu, Xiaochuan Covey, John Chen, Ray T. |
| Copyright Year | 2012 |
| Abstract | We report a subwavelength grating (SWG) coupler for coupling light efficiently into in-plane semiconductor nanomembrane photonic devices for the first time. The SWG coupler consists of a periodic array of rectangular trenches fabricated on a silicon nanomembrane (SiNM) transferred onto a glass substrate. At a wavelength of 1555.56 nm, the coupling efficiency of the fabricated 10 µm wide, 17.1 µm long SWG is 39.17% (-4.07 dB), with 1 dB and 3 dB bandwidths of 29 nm and 57 nm, respectively. Peak efficiency varies by 0.26 dB when measuring 5 fabricated grating pairs. Coupling efficiency can further be improved with an improved SiNM transfer process. Such high efficiency couplers allow for the successful realization of a plethora of hybrid photonic devices utilizing nanomembrane technology. |
| File Format | PDF HTM / HTML |
| DOI | 10.1364/OE.20.020659 |
| PubMed reference number | 23037113 |
| Journal | Medline |
| Volume Number | 20 |
| Issue Number | 18 |
| Alternate Webpage(s) | http://chen-server.mer.utexas.edu/2012/HarishOE2012.pdf |
| Alternate Webpage(s) | https://doi.org/10.1364/OE.20.020659 |
| Journal | Optics express |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
