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Wafer Carrier and Method of Material Removal Froma Semconductor Wafer Background of the Invention
| Content Provider | Semantic Scholar |
|---|---|
| Author | Lally, Joseph P. Zzzzzzz Z N. |
| Copyright Year | 2017 |
| Abstract | (54) WAFER CARRIER AND METHOD OF 6,203,408 B1 3/2001 Quek .......................... 451/41 MATERIAL REMOVAL FROMA FOREIGN PATENT DOCUMENTS SEMCONDUCTOR WAFER EP O558787 A1 9/1993 (75) Inventors: James F. Vanell, Tempe, AZ (US); WO WO O1/72472 A2 10/2001 James A. Grootegoed, Chandler, AZ * cited b (US); Laura John, Chandler, AZ (US) cited by examiner Primary Examiner Joseph J. Hall, III (73) Assignee: Motorola, Inc., Schaumburg ASSistant Examiner David B. Thomas (74) Attorney, Agent, or Firm-Lanny L. Parker; Robert A. (*) Notice: Subject to any disclaimer, the term of this Rodriguez; Joseph P. Lally patent is extended or adjusted under 35 U.S.C. 154(b) by 134 days. (57) ABSTRACT |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://patentimages.storage.googleapis.com/57/e9/34/942509357cd51e/US6592434.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |