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Self-assembled monolayers as anti-stiction coatings for MEMS : characteristics and recent developments
| Content Provider | Semantic Scholar |
|---|---|
| Author | Maboudian, Roya Ashurst, W. Robert Carraro, C. F. F. |
| Copyright Year | 1999 |
| Abstract | Despite significant advances in surface micromachining technology, stiction remains a key problem, severely limiting the realization Ž . and reliability of many micro-electro-mechanical systems MEMS devices. In this article, we focus on self-assembled monolayers as release and anti-stiction coatings for MEMS. Their formation mechanism, the microstructure coating process, and the characteristics of the coated microstructures are described, followed by a discussion of the current limitations, areas for improvements and recent progress for this coating technology. q 2000 Elsevier Science S.A. All rights reserved. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://www.cchem.berkeley.edu/rmgrp/S&A-00.pdf |
| Language | English |
| Access Restriction | Open |
| Subject Keyword | Coating Excipient Conformal coating Medication Event Monitoring System Micro-Electrical-Mechanical Systems Microelectromechanical systems Microtechnology Self-assembled monolayer |
| Content Type | Text |
| Resource Type | Article |
