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Low temperature co-fired ceramic (LTCC) structures for sensor and fluidic applications
| Content Provider | Semantic Scholar |
|---|---|
| Author | Birol, Hansu Maeder, Thomas Jacq, Caroline Ryser, Peter |
| Copyright Year | 2004 |
| Abstract | Keywords: technologie des couches epaisses ; thick-film technology ; LTCC ; couches epaisses ; couches sacrificielles ; graphite Note: Resultats sur la structuration de membranes en LTCC avec la technique du carbone sacrificiel. Reference LPM-CONF-2004-014 Record created on 2006-06-22, modified on 2016-08-08 |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://os.unil.cloud.switch.ch/tind-customer-epfl/0b10e4ee-6811-49d9-b237-50788fe2bfd4?AWSAccessKeyId=ded3589a13b4450889b2f728d54861a6&Expires=1569843065&Signature=xAtRd0wBEEAUdycwxAgxDFNO7dQ%3D&response-content-disposition=attachment%3B+filename*%3DUTF-8''2004%2520Birol%2520ACerS%2520Indianapolis%2520-%2520structuration%2520LTCC%2520-%2520couches%2520sacrificielles%2520carbone.pdf&response-content-type=application/pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |