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Novel quantum effect devices realized by fusion of bio-template and defect-free neutral beam etching
| Content Provider | Semantic Scholar |
|---|---|
| Author | Samukawa, Seiji |
| Copyright Year | 2013 |
| Abstract | An original top-down process involving a bio-template and damage-free neutral beam etching (NBE) has been developed to fabricate a high-quality nanodisk superlattice. The self-assemble ferritin 2D array (iron core diameter: 4.5 nm) acts as uniform etching mask and our developed neutral beam etching eliminates UV photons and high-energy charged particles to achieve a damage-free etching. As a result, we have fabricated a high-quality nanodisk superlattice with a high density (1.4 × 1012 cm-2), uniform size (Si nanodisk diameter: 6.4 nm), and well-ordered arrangement (hexagonal close packing). The Si nanodisk 2D array with SiC interlayer had an extremely high optical absorption coefficient and high carrier transport due to the formation of a wide miniband. This advanced nano-process brings high-efficiency quantum dot (QD) solar cell (SC). |
| Starting Page | 316 |
| Ending Page | 317 |
| Page Count | 2 |
| File Format | PDF HTM / HTML |
| DOI | 10.7567/SSDM.2010.G-8-1 |
| Alternate Webpage(s) | https://confit.atlas.jp/guide/event-img/ssdm2010/G-8-1/public/pdf_archive?type=in |
| Alternate Webpage(s) | https://doi.org/10.7567/SSDM.2010.G-8-1 |
| Journal | 2013 IEEE 5th International Nanoelectronics Conference (INEC) |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
