Loading...
Please wait, while we are loading the content...
Similar Documents
Optical and mechanical properties of amorphous Mg-Si-O-N thin films deposited by reactive magnetron sputtering
| Content Provider | Semantic Scholar |
|---|---|
| Author | Ali, Sharafat Paul, Biplab Magnusson, Roger Ekstrom, Erik A. Pallier, Camille Jonson, Bo Eklund, Per Birch, Jens |
| Copyright Year | 2019 |
| Abstract | In this work, amorphous thin films in Mg-Si-O-N system were prepared in order to investigate the dependence of optical and mechanical properties on Mg composition. Reactive RF magnetron co-sputtering from magnesium and silicon targets were used for the deposition of Mg-Si-O-N thin films. Films were deposited on float glass, silica wafers and sapphire substrates in an Ar, N2 and O2 gas mixture. X-ray photoelectron spectroscopy, atomic force microscopy, scanning electron microscopy, spectroscopic ellipsometry, and nanoindentation were employed to characterize the composition, surface morphology, and properties of the films. |
| Starting Page | 9 |
| Ending Page | 15 |
| Page Count | 7 |
| File Format | PDF HTM / HTML |
| DOI | 10.1016/j.surfcoat.2019.05.015 |
| Alternate Webpage(s) | http://www.diva-portal.org/smash/get/diva2:1339681/FULLTEXT03.pdf |
| Alternate Webpage(s) | https://arxiv.org/pdf/1905.02420v1.pdf |
| Alternate Webpage(s) | http://arxiv-export-lb.library.cornell.edu/pdf/1905.02420 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
