NDLI: Producción de películas delgadas de TIO 2 obtenidas por la técnica de arco catódico TiO 2 thin films production by Cathodic Arc technique

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Producción de películas delgadas de TIO 2 obtenidas por la técnica de arco catódico TiO 2 thin films production by Cathodic Arc technique

Content Provider	Semantic Scholar
Author	Cristina, Liliam Morimitsu, A. Rincón, Daniel Escobar Parra, Restrepo Arango, Pedro José Arango
Copyright Year	2014
Abstract	Titanium dioxide thin films (TiO 2) were grown using plasma assisted physical vapor deposition (PAPVD) in a cathodic arc system by using a Ti target. For the films production in a reaction chamber, two opposite electrodes were placed (sample and substrate) with an inter-electrode distance of 4 mm. The reaction chamber was filled with a mixture of argon and oxygen in order to reach the suitable working pressure (2 mbar). The discharges were carried out by using a RLC circuit, which allows to vary the inter electrode voltage between 0 and 300 V, with a maximum current of 300 A. By means of GIXRD (X-ray diffraction in the grazing incidence mode) crystalline phases, texture coefficient, crystallite size, micro strain and lattice parameter of the films were identified. Crystallite size and micro strain taking into account the instrumental broadening of the XRD equipment using the Scherrer equation were determined. Moreover, a pseudo voigt function was used for the Rietveld refinement using TOPAS software. GIXRD analysis shows the formation of the rutile and anatase phase of TiO2 with tetragonal crystal structure and planes orientation in (210), (004), and (204) respectively. Using the Scanning Electron Microscopy (SEM) and Energy Dispersive spectroscopy X-ray (EDX) analysis, micrographs and elemental composition of the coatings were obtained. Using µ-Raman the TiO2 phases were corroborated. Key Word — PAPVD, TiO 2, Cathodic Arc, GIXRD, SEM, EDX, µ-RAMAN.
File Format	PDF HTM / HTML
Alternate Webpage(s)	http://revistas.utp.edu.co/index.php/revistaciencia/article/download/7727/5715
Language	English
Access Restriction	Open
Content Type	Text
Resource Type	Article

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