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Dry Etching Method Background of the Invention
| Content Provider | Semantic Scholar |
|---|---|
| Author | Kazunori Tsujimoto Sadayuki Okudaira |
| Copyright Year | 2017 |
| Abstract | (54) DRY ETCHING METHOD Shinichi Tachi, Sayama; Kazunori Tsujimoto, Higashiyamato; Sadayuki Okudaira, Ome, all of Japan 73) Assignee: Hitachi, Ltd., Tokyo, Japan 21 Appl. No.: 223,570 (22 Filed: Jul. 25, 1988 (30) Foreign Application Priority Data Jul. 29, 1987 JP Japan . 62-187549 51 Int. Cl. . C03C 15/00; C23F 1/00 52 U.S. C. . 156/643; 156/646; 156/656; 156/657; 156/659.1; 156/662; 156/664; 156/665 75) Inventors: |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://patentimages.storage.googleapis.com/0f/27/6b/6c7dfe861e9505/US4992136.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Patent |