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Method of Providing Trench Walls by Using Two-step Etching Processes Background of the Invention
| Content Provider | Semantic Scholar |
|---|---|
| Author | Nelms, David |
| Copyright Year | 2017 |
| Abstract | 3,663.870 A 5/1972 Tsutsumi et al. 4,495,219 A 1/1985 Kato et al. 5,395,786 A * 3/1995 Hsu et al. ................... 438/248 5,744,386 A * 4/1998 Kenney ...................... 438/245 5,770,878 A 6/1998 Beasom 5,776,621 A 7/1998 Nashimoto 5,827,765 A 10/1998 Stenglet al. 5,923,056. A 7/1999 Lee et al. 6,319.766 B1 * 11/2001 Bakli et al. ................. 438/240 6,323,078 B1 * 11/2001 Bhowmik et al. .......... 438/238 6,348,420 B1 * 2/2002 Raaijmakers et al. ....... 438/769 |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://patentimages.storage.googleapis.com/c0/32/aa/0683807533f266/US6653185.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Patent |