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A MINIATIJRE HIGH-SENSITIVITY BROAD-BAND ACCELEROMETER llASED ON ELECTRON TIJNNELING TRANSD[JCERS
| Content Provider | Semantic Scholar |
|---|---|
| Author | Rockstad Howard K. Kenny, Thomas W. Reynolds, Joyce K. Kaiser, William J. Gabrielson, Thomas B. |
| Copyright Year | 1997 |
| Abstract | New high-sensitivity microsensors have been developed using high-resolution position sensors based on electron tunneling. Design of miniature accelerometers having sensitivities approaching 10-9 g/& is discussed, A new dual-element electron tunneling structure, which overcomes bandwidth limitations of single-element structures, allows design of high sensitivity accelerometers operating in a band from a few Hz to several kHz, A miniature accelerometer based on this structure can thus have application as a sensitive acoustic sensor. Thermal vibration of the proof mass is an extremely important constraint in miniature accelerometers, and can be the dominant limitation on the sensitivity. Thermal noise is analysed for the suspended masses of the dual-element structure, and compared with electronic noise in the tunneling circuit. With a proof mass of 100 mg, noise analysis predicts limiting sensitivities approaching 10-9 g/& in a 300 HY band and 10-8 g/& at 1 kH~,, Prototype accelerometers have been fabricated by silicon micromachining and tested, Sensitivity better than 10-b g/& at 10 HY, is obtained in a heavily damped device tested in air; a Q>>l is obtained in vacuum, and is expected to give much improved sensitivities, |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | https://trs.jpl.nasa.gov/bitstream/handle/2014/35071/93-0614.pdf?isAllowed=y&sequence=1 |
| Alternate Webpage(s) | http://techreports.jpl.nasa.gov/1993/93-0614.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
