NDLI: Session c14 accelerometers transducers ’93 a miniature high-sensitivity broad-band accelerometer based on electron tunneling transducers.

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Session c14 accelerometers transducers ’93 a miniature high-sensitivity broad-band accelerometer based on electron tunneling transducers.

Content Provider	CiteSeerX
Author	Roekstad, Howard K. Kenny, T. W. Reynolds, J. K. Kaiser, W. J. Gabnelson, Thomas B.
Abstract	ABSTRACT., New high-sensitivity microsensors have been developed using high-resolution position sensors based on electron tunneling. Design of miniature accelerometers having resolutions approaching 10-9 g/ @ is discussed. A new dual-element electron tunneling structure, which overcomes bandwidth limitations of single-element structures, allows design of high sensitivity accelerometers operating in a band from a few Hz to several kHz. A miniature accelerometer based on this structure can thus have application as a sensitive acoustic sensor. Thermal vibration of the, proof mass is an extremely important constraint in miniature accelerometers, and can be the dominant limitation on the sensitivity. Thermal noise is analyzed for the suspended masses of the dual-element structure, and compared with electronic noise in the tunneling circuit. With a proof mass of 100 mg, noise analysis predicts limiting resolutions approaching 10-9 g/ @ in a 300 Hz band and 10-8 g/ & at 1 kHz. Prototype accelerometers have been fabricated by silicon micromachining and tested. A noise resolution of 10-7 g/ & between 4 and 70 Hz and 6 x 10-7 g/ @ at 400 Hz is observed in a damped device. The low-frequency responsivity of this device is 100,000 V/g, decreasing to 1300 V/g at 600 Hz.
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Subject Keyword	Session C14 Accelerometer Transducer Miniature Accelerometer Proof Mass Sensitive Acoustic Sensor Noise Analysis Thermal Vibration Noise Resolution Thermal Noise New Dual-element Electron Tunneling Structure Dominant Limitation Electronic Noise Several Khz Dual-element Structure Low-frequency Responsivity Suspended Mass New High-sensitivity Microsensors High-resolution Position Sensor Silicon Micromachining High Sensitivity Accelerometer Bandwidth Limitation Single-element Structure Prototype Accelerometer Damped Device Hz Band Tunneling Circuit Important Constraint Electron Tunneling
Content Type	Text

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