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Study of environmental survivability and stability of Folded MEMS IMU
| Content Provider | Semantic Scholar |
|---|---|
| Author | Efimovskaya, Alexandra Shkel, Andrei M. |
| Copyright Year | 2017 |
| Abstract | This paper presents a study on the structural rigidity of an Inertial Measurement Unit (IMU) implemented using the Folded MEMS approach. For such folded structures, environmental survivability and stability is a natural concern. We investigated IMUs of 35 mm3 (small) and 130 mm3 (medium) in volume, in the shape of a cube and a pyramid, and considered the reinforcement methods, including epoxy, eutectic solder, and silicon welding. Experimental characterization of a medium cube with eutectic reinforcement showed the maximum tilt of 0.2 mrad on the cube's sidewalls under temperature variation 25°C–90°C and the tilt of 0.2mrad under 10Hz to 20kHz vibration. An IMU error model was implemented, with the target sensors performance of tactical-grade, using in-run bias stability and scale factor (SF) stability for gyroscope (1°/hr, 100ppm) and for accelerometer (100µg, 100ppm), and a pre-defined trajectory with 122s flight time. The 0.2 mrad misalignment for the medium eutectic-soldered cube corresponded to a Circular Error Probable (CEP) rate of 1.25 nmi/hr, and a typical tactical grade IMU corresponded to CEP rate ≤1nmi/hr. We also concluded that the 35mm3 eutectic-bonding reinforced cubes will survive the mechanical shock under 10,000g, while silicon welding reinforced cubes of 35 mm3 would survive the shocks of 20,000g. |
| Starting Page | 132 |
| Ending Page | 135 |
| Page Count | 4 |
| File Format | PDF HTM / HTML |
| DOI | 10.1109/ISISS.2017.7935689 |
| Alternate Webpage(s) | https://mems.eng.uci.edu/files/2018/11/C159Study-of-Environmental-Survivability-and-Stability.pdf |
| Alternate Webpage(s) | https://doi.org/10.1109/ISISS.2017.7935689 |
| Journal | 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
