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Epitaxial c-axis oriented BaTiO 3 thin films on SrTiO 3-buffered Si ( 001 ) by atomic layer deposition Thong
| Content Provider | Semantic Scholar |
|---|---|
| Author | Posadas, Agham B. Mcdaniel, Martin Hu, Chengqing Bruley, J. Yu, Edward Tsu-Wei Demkov, Alexander A. Ekerdt, John G. |
| Copyright Year | 2014 |
| Abstract | by atomic layer deposition Thong Q. Ngo, Agham B. Posadas, Martin D. McDaniel, Chengqing Hu, John Bruley, Edward T. Yu, Alexander A. Demkov, and John G. Ekerdt Department of Chemical Engineering, The University of Texas at Austin, Austin, Texas 78712, USA Department of Physics, The University of Texas at Austin, Austin, Texas 78712, USA Department of Electrical Engineering, The University of Texas at Austin, Austin, Texas 78712, USA IBM Research Division, Yorktown Heights, New York 10593, USA |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://etylab.ece.utexas.edu/files/2016/01/APL_104_082910_2014.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |