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MEMS - Recent Developments, Future Directions
| Content Provider | Semantic Scholar |
|---|---|
| Author | Heeren, Henne Van |
| Copyright Year | 2007 |
| Abstract | This report deals with the field of micro-electromechanical systems, or MEMS. MEMS encompass the process-based technologies used to fabricate tiny integrated devices and/or systems that integrate functionalities from different physical domains into one device. Such devices are fabricated using a wide range of technologies, having in common the ability to create structures with microand even nanometer accuracies. The products range in size from a few micrometers to millimetres. These devices (or systems) have the ability to sense, control and actuate on the micro scale, and generate effects on the macro scale. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://www.lboro.ac.uk/microsites/mechman/research/ipm-ktn/pdf/Technology_review/mems-recent-developments-future-directions.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
