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Direct integration of carbon nanotubes in Si microstructures
| Content Provider | Semantic Scholar |
|---|---|
| Author | Aasmundtveit, Knut E. Ta, Bao Quoc Lin, Liwei Halvorsen, Einar Hoivik, Nils |
| Copyright Year | 2012 |
| Abstract | In this paper we present a low-cost, room-temperature process for integrating carbon nanotubes on Si microsystems. The process uses localized resistive heating by controlling current through suspended microbridges, to provide local temperatures high enough for CVD growth of carbon nanotubes. Locally grown carbon nanotubes make electrical connections through guidance by electric fields, thus eventually making circuits. The process is scalable to a wafer level batch process. Furthermore, it is controlled electrically, thus enabling automated control. Direct integration of carbon nanotubes in microstructures has great promise for nano-functional devices, such as ultrasensitive chemical sensors. Initial measurements demonstrate the Si–carbon nanotube–Si circuit's potential as a NH3 sensor. |
| Starting Page | 074006 |
| Ending Page | 074006 |
| Page Count | 1 |
| File Format | PDF HTM / HTML |
| DOI | 10.1088/0960-1317/22/7/074006 |
| Volume Number | 22 |
| Alternate Webpage(s) | http://lwlin.me.berkeley.edu/papers/JMM074006.pdf |
| Alternate Webpage(s) | https://doi.org/10.1088/0960-1317%2F22%2F7%2F074006 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
