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Light emission from silicon nanocrystals embedded in ALD-alumina at low temperatures
| Content Provider | Semantic Scholar |
|---|---|
| Author | Brunets, Ihor Loon, R. Van Walters, Richard J. Polman, Albert Boogaard, A. T. Aarnink, Antonius A. I. Kovalgin, Alexeij Y. Wolters, Robertus A. M. Holleman, Joshua Schmitz, Jurriaan |
| Copyright Year | 2008 |
| Abstract | In this work, we realize light emitting functional multilayer (Al2O3 / Si-nanocrystals (Si-NC)) stacks at low temperatures (300-325 °C) by a combination of ALD and CVD techniques. The multilayer structure was obtained by a sequential deposition of a 20 nm-thick ALD Al2O3 film, followed by LPCVD of a Si-NC layer, without vacuum break. A high nanocrystal density was achieved through an enhanced nucleation rate by using trisilane (Si3H8, known as Silcore®) as precursors for LPCVD of Si-NC layers. The photoluminescence and electroluminescence of the functional multilayer stacks were measured. A decrease of the Si-NC deposition time (i.e. smaller size of Si-NC’s) provided a gradual shift of the photoluminescence peak to higher photon energies, indicating exciton confinement in the nanocrystals. |
| File Format | PDF HTM / HTML |
| Alternate Webpage(s) | http://eprints.eemcs.utwente.nl/14602/01/brunets.pdf |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |
