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Experimental characterization of two-axis MEMS scanners with hidden radial vertical combdrive actuators and cross-bar spring structures
| Content Provider | Semantic Scholar |
|---|---|
| Author | Tsai, Jui-Che Hsieh, Tien-Liang Liao, Chun-Da Chiou, Sheng-Jie Hah, Dooyoung Wu, Ming C. |
| Copyright Year | 2009 |
| Abstract | In this paper, we perform the experimental characterization of two-axis MEMS scanners driven by radial vertical combdrive actuators. The dc scan ranges are limited by the pull-in effect. Each scanner utilizes a cross-bar spring structure to achieve two rotational degrees of freedom (DOFs) without employing any gimbal. Both the actuators and torsion springs are hidden underneath the mirror to obtain a small form factor. The devices are fabricated by a five-layer polysilicon surface micromachining process (SUMMiT-V). Devices with different combinations of parameter values are experimentally characterized and compared. |
| Starting Page | 045002 |
| Ending Page | 045002 |
| Page Count | 1 |
| File Format | PDF HTM / HTML |
| DOI | 10.1088/0960-1317/19/4/045002 |
| Volume Number | 19 |
| Alternate Webpage(s) | http://nanophotonics.eecs.berkeley.edu/Publications/Journal/files/2643/Tsai%20et%20al.%20-%202009%20-%20Experimental%20characterization%20of%20two-axis%20MEMS%20sca.pdf |
| Alternate Webpage(s) | https://doi.org/10.1088/0960-1317%2F19%2F4%2F045002 |
| Language | English |
| Access Restriction | Open |
| Content Type | Text |
| Resource Type | Article |